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  • 1:16 AM, Saturday, 11 Jul 2020

Course Undergraduate
Semester Electives
Subject Code AV485
Subject Title Microelectronics and Microsystem Technologies


Introduction to Microelectronics and Microsystems: Classical scaling in CMOS, Moore’s Law ‐ Clean room concept, Growth of single crystal Si, Cleaning and etching ‐Thermal oxidation of
silicon ‐ Dopant diffusion in silicon ‐ Thin film deposition (PVD, CVD, ALD etc.) ‐ Ion‐implantation – Lithography – Etching ‐ CMOS Process integration‐ Advanced CMOS
devices. Microelectronic technologies for MEMS: MEMS Materials , Surface and Bulk
Micromachining ‐ MEMS Micro sensors, and applications ‐ Mechanical, Inertial, Biological,
Chemical, RF Applications etc. ‐ Bonding & Packaging of MEMS ‐ CMOS‐MEMS Integration

Text Books

1. James Plummer, M. Deal and P.Griffin, Silicon VLSI Technology, Prentice Hall Electronics

2. Stephen Campbell, The Science and Engineering of Microelectronics, Oxford University Press, 1996

3. S.M. Sze (Ed), VLSI Technology, 2nd Edition, McGraw Hill, 1988

4. C.Y. Chang and S.M.Sze (Ed), ULSI Technology, McGraw Hill Companies Inc, 1996.

5. Marc Madau, Fundamentals of Microfabrication Science of Miniaturization, CRC Press

6. Tai‐Ran Hsu MEMS & Microsystems: Design, Manufacture, and Nanoscale Engineering, 2nd Edition
7. S. D. Senturia, Microsystem Design, 2005.

8. G. K. Ananthasuresh , K. J. Vinoy, S. Gopalakrishnan, K. N. Bhat , V. K. Aatre Micro and Smart Systems Technology and Modeling, 2012


Same as Textbooks