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  • 11:30 AM, Tuesday, 04 Aug 2020


Course Postgraduate
Semester Electives
Subject Code AVR861
Subject Title RF IC and Microwave Mems

Syllabus

Intro to MMIC, Processing & Layers, Passive MMIC Elements & Models, Active MMIC Elements & Models Biasing, Amplifiers.

Introduction to MMICs. Technologies: GaAs/Si/InP: MESFET HEMT BJT HBT. Applications, Circuit basics.  Fabrication Technology. MMIC components, Active devices, Passive lumped elements, Microstrip elements.

Introduction: RF MEMS for microwave applications, MEMS technology and fabrication, mechanical modelling of MEMS devices, MEMS materials and fabrication techniques.
MEMS Switches: Introduction to MEMS switches; Capacitive shunt and series switches: Physical description, circuit model and electromagnetic modelling; Techniques of MEMS switch fabrication and packaging; Design of MEMS switches.

MEMS Switches: Introduction to MEMS switches; Capacitive shunt and series switches: Physical description, circuit model and electromagnetic modelling; Techniques of MEMS switch fabrication and packaging; Design of MEMS switches.

RF Filters and Phase Shifters: Modeling of mechanical filters, micromachined filters, surface acoustic wave filters, micromachined filters for millimeter wave frequencies; Various types of MEMS phase shifters; Ferroelectric phase shifters.

Transmission Lines and Antennas: Micromachined transmission lines, losses in transmission lines, coplanar transmission lines, micromachined waveguide components; Micromachined antennas: Micromachining techniques to improve antenna performance, reconfigurable antennas.

Integration and Packaging: Role of MEMS packages, types of MEMS packages, module packaging, packaging materials and reliability issues.

Text Books
  1. Varadan, V.K., Vinoy, K.J. and Jose, K.J., “RF MEMS and their Applications”, John Wiley & Sons. 2002.
  2. Rebeiz, G.M., “MEMS: Theory Design and Technology”, John Wiley & Sons. 1999.
  3. De Los Santos, H.J, “RF MEMS Circuit Design for Wireless Communications”, Artech House. 1999
  4. Trimmer, W., “Micromechanics & MEMS”, IEEE Press. 1996
  5. Madou, M., “Fundamentals of Microfabrication”, CRC Press. 1997
  6. Sze, S.M., “Semiconductor Sensors”, John Wiley & Sons. 1994.
References

Same as text books