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  • 10:42 PM, Friday, 22 Oct 2021

Course Postgraduate
Semester Sem. I
Subject Code AVM612
Subject Title Introduction to Micro Electro Mechanical Systems (MEMS)


History of Microsystem Technology with overview on commercial products, Scaling
laws, Microelectronic technologies for MEMS ,Materials and processing for MEMS,
Micromachining Technology: Surface and Bulk Micromachining, Microsystem
modelling: Mechanics of microsystems, Transduction Mechanisms (optical,
piezoelectric, piezoresistive etc.), MEMS Micro sensors, and applications.

Text Books

Same as Reference


1. S. D. Senturia, Microsystem Design (2005 edition)
2. Foundations of MEMS Chang Liu, Pearson
3. Minhang Bao "Analysis and Design Principles of MEMS Devicess",
4. Marc Madau, Fundamentals of Microfabrication Science of Miniaturization, CRC Press
5. G. K. Ananthasuresh , K. J. Vinoy, S. Gopalakrishnan, K. N. Bhat , V. K. Aatre Micro and Smart Systems Technology and Modeling (January 2012)
Peer reviewed international journals such as IEEE/ASME Journal of MEMS, IOP Journal of Micromechanics and Microengineering, IOP Journal of Nanotechnology,
Elseivier Sensors and Actuators etc. and conference proceedings such as IEEE MEMS, IEEE Nanotechnology, Transducers etc.