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  • 9:25 PM, Friday, 22 Oct 2021

Course Postgraduate
Semester Electives
Subject Code AVM864
Subject Title RF MEMS


Introduction to RF MEMS, , Electrical and mechanical modelling of MEMS devices,
MEMS Switches: Introduction to MEMS switches; Capacitive shunt and series
switches: Physical description, circuit model and electromagnetic modelling;
Techniques of MEMS switch fabrication and packaging; Design of MEMS switches.
RF Filters and Phase Shifters: Modeling of mechanical filters, micromachined filters,
surface acoustic wave filters, micromachined filters for millimeter wave frequencies;
Various types of MEMS phase shifters; Ferroelectric phase shifters.
MEMS Varactor, MEMS Resonators
micromachined waveguide components; Micromachined antennas: Micromachining
techniques to improve antenna performance, reconfigurable antennas.
Integration and Packaging for RF MEMS: Role of MEMS packages, types of MEMS
packages, module packaging, packaging materials and reliability issues.

Text Books

1. Varadan, V.K., Vinoy, K.J. and Jose, K.J., “RF MEMS and their Applications”, John Wiley & Sons. 2002.
2. Rebeiz, G.M., “MEMS: Theory Design and Technology”, John Wiley & Sons. 1999.
3. De Los Santos, H.J, “RF MEMS Circuit Design for Wireless Communications”, Artech House. 1999
4. Research papers and study material of Clark T.-C. Nguyen, Electrical Engineering and Computer Sciences , UC Berkeley Nguyen Book to be added