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  • 10:26 PM, Friday, 22 Oct 2021

Course Postgraduate
Semester Electives
Subject Code AVM866
Subject Title Thin films: Materials and characterization


Material Science: introduction, structure, defects, bonds and bands, thermodynamics
of material, kinetics, nucleation.
Thin film nucleation: Atomic view of substrate surfaces, thermodynamic aspects of
Nucleation, Kinetic processes in Nucleation and growth.
Epitaxy: Lattice mismatch and defects in epitaxial film, epitaxy of compound
semiconductors, High and low temp. methods of deposition.
structural and chemical characterization of films and surfaces. XRD, TEM, AFM,
Inter diffusion: compound formation, phase transformation in thin film, metalsmiconductor
reaction, mass transport in thin film.
Mechanical properties of thin films: Mechanical testing and strength of thin films,
analysis of internal stress,

Text Books

Same as Reference


1. Micro- and Opto- Electronic Materials and Structures: Ephrahim Suhir, Y.C Lee, C. P Wong
2. Thin Film Phenomena: Kasturi L. Chopra
3. Thin Film Device Applications: Kasturi L. Chopra, Indrajeet Kaur
4. The materials Science of Thin Films: Milton Ohring
5. Hand book of thin films deposition processes and techniques; Priciples, methods, equipment, and application: Klaus K. Schuegraf
6. Thin Film Physics: O. S. Heavens