Closed Loop In-Plane Movable Suspended Gate FET(CLIP-SGFET) based Accelerometer and The Fabrication Method Thereof
The invention is a closed loop MEMS Accelerometer implemented using suspended gate field effect transistors (SGFET) and the method of fabricating this sensor. This closed loop accelerometer (Closed loop in plane movable SGFET-CLIP-SGFET) has an in-plane movable suspended gate FETs in the differential amplifier configuration. In the closed loop operation, the CMOS-MEMS SGFET differential amplifier’s output voltage is used, through a closed loop controller and a high voltage charge pump to drive an actuator which brings the gate back to its resting position.
