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MEMS Nanomechanical Membrane-Flexure Sensors with Integrated Electromechanical Transduction: Design, Fabrication and Application Development
MEMS Nanomechanical Membrane-Flexure Sensors with Integrated Electromechanical Transduction: Design, Fabrication and Application Development
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MEMS Nanomechanical Membrane-Flexure Sensors with Integrated Electromechanical Transduction: Design, Fabrication and Application Development
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Mon, 26 May 2025 - 10:38
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